• Couplings
  • Oldham Type


Cleanroom / Vacuum / Heat Resistant Couplings - Oldham Type (VESPEL) - Clamping Type

  • Cleanroom Specification
  • High Temperature Specification

Dimension Drawing

MOHS-CCleanroom / Vacuum / Heat Resistant Couplings - Oldham Type (VESPEL) - Clamping Type寸法図

Part Number ALWEFGM Screw Tightening
Torque (N・m)
Add to Cart
MOHS-32C-12-12 31.7 10 33.3 18 5 11 M4 1.2 638.78 CAD Cart

Part Number Max. Bore Diameter
Max. Torque
Max. Rotational Frequency
Moment of
Max. Lateral Misalignment
Max. Angular
(g) *2
MOHS-32C-12-12 14 2.2 4.4 900 1.6×10-5 600 2 2 110

*1: Correction of rated torque and max. torque due to load fluctuation is not required. For more detailed information, please refer to Selection Guidelines.
*2: These are values with max. bore diameter.


Clamping Type


MOHS-C_CCleanroom / Vacuum / Heat Resistant Couplings - Oldham Type (VESPEL)


Hub SUS303
Spacer VESPEL*1
Hex Socket Head Cap Screw SUSXM7
Molybdenum Disulfide Coating

*1: VESPEL is a registered trademark of DuPont.
The color may vary depending on the lot or other matters.


  • Property
Low Particle
Low Outgas
Chemical Resistance
Allowable Misalignment
Electrical Insulation
Cleanroom Specification
Allowable Operating Temperature -20℃ to 200℃

◎: Excellent ○: Very good
△: Abrasion powder may be produced

  • This is an oldham type flexible coupling.
  • Cleanroom wash/cleanroom packing provided. It can be used in an environment or cleanroom where heat resistance and chemical resistance are required, such as FPD manufacturing equipment.
  • VESPEL SCP-5000 is adopted in the spacer.
    This is superior in heat resistance and chemical resistance, and the amount of outgas at high temperature is ultralow.
  • Slippage of hubs and a spacer allows eccentricity and angular misalignment to be accepted.
  • The load on the shaft generated by misalignment is small and the burden on the shaft is reduced.


FPD manufacturing device / Semiconductor manufacturing device

Precautions for Use

In case of mounting on D-cut shaft, be careful about the position of the D-cut surface of the shaft. ⇒Mounting and Maintenance
There are sizes where the hex socket head bolt exceeds the outer diameter of the coupling and the rotating diameter is larger than the outer diameter. Please be careful of the interference of coupling. Rotation Diameter

Analysis of Outgas

Unit : (v/v ppm)

Component Content
Inorganic Gas Hydrogen 500 or Less
Carbon Monoxide 500 or Less
Carbon Dioxide 500 or Less
Organic Gas Methane 5 or Less
Ethane 5 or Less
Ethylene 5 or Less
Propane 5 or Less
Acetylene 5 or Less
i-Butane 5 or Less
n-Butane 5 or Less
Propylene 5 or Less

Both inorganic gas and organic gas are not more than the lower limit of determined amount and are not detected.

  • Measurement Method
    Inorganic gas----Gas chromatography (TCD)
    Organic gas----Gas chromatography (FID)
  • Measurement Conditions
    Heating temperature----100°C

MOHS-C_TTechnical Information

Eccentric Reaction Force

These are initial slippage load values of hubs and a spacer.
After running-in operation, the slippage load becomes small, the load on the shaft due to misalignment becomes lowered, and the burden on the shaft bearing is reduced.

MOHS-C_TTechnical Information

Change in static torsional stiffness due to temperature

This is a value under the condition where the static torsional stiffness at 20°C is 100%.
The change of MOHS-C in torsional stiffness due to temperature is small and the change in responsiveness is extremely small. If the unit is used under higher temperature, be careful about misalignment due to elongation or deflection of the shaft associated with thermal expansion.

MOHS-C_TTechnical Information

Product List

Click here to see MOHS-32C

Click here to see MOHS-C