• Special Screws
  • Vacuum Application Screws


Cover Caps

  • Vacuum
  • Cleanroom Specification
  • Heat-resistance
  • Chemical-proof
  • Electrical Insulation

Dimension Drawing

SCAP-CECover Caps寸法図

Unit : mm

Part Number M (Fine)
Nominal of Thread
Pitch H D1 h B tB Recommended Torque
SCAP Part No. Mass
SCAP-10-CE M16 1 12 20 6 17 4 0.8 SNCPS-M10 9.2 81.43 CAD Cart

● Batch cleanroom packing is provided for orders containing multiple items of the same size.

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Cover Caps
Main Body Al2O3
(99.5% Alumina)


Film formation equipment, etching devices, FPD production equipment, and semiconductor devices


  • Combine SCAPCover Cap and SNCPSSocket Head Cap Screw for Cover Cap.
  • These caps prevent the corrosion of screw heads due to vacuum chamber processing gas and plasma.
  • SCAPhas 2 material types as standard.
    SCAP-AL----Aluminum alloy
  • The screw connection section is made of stainless steel, so this product has a higher tightening strength than aluminum or ceramic screws.
  • Cleanroom wash and cleanroom packing are completed.⇒Cleanroom Wash / Cleanroom Packing Service
  • Other requested materials such as Inconel*1 and Hastelloy*1 can be used for Cover Caps.

*1: Inconel is a registered trademark of Special Metals Corporation.
*1: Hastelloy is a registered trademark of Haynes International, Inc.

Precautions for Use

Corrosion resistance changes depending on use conditions. Always carry out tests under conditions same as actual conditions before use.


After tightening SNCPS Socket Head Cap Screw for Cover Cap, assemble SCAP Cover Cap so that it covers the head of SNCPS.
Ensure that the tightening torque of SCAP does not exceed the recommended torque in the chart.

SCAP-CECover Caps

Related Products

SCAP-PTCover Cap made of PTFE (Polytetrafluoroethylene), which has excellent chemical resistance, is available.

SCAP-AL/SCAP-CE/SNCPSCover Caps / Socket Head Cap Screws for Cover Caps

Product List

Click here to see SCAP-CE

Click here to see Vacuum Application Screws