• Couplings
  • Oldham Type

Cleanroom / Vacuum / Heat Resistant Couplings - Oldham Type (PEEK) - Clamping Type


  • Cleanroom Specification
  • A Trace of Outgas

Dimension Drawing

MOP-CCleanroom / Vacuum / Heat Resistant Couplings - Oldham Type (PEEK) - Clamping Type寸法図


Part Number ALWEFGM Screw Tightening
Torque (N・m)
Standard Bore Diameter
Add to Cart Additional Modification
MOP-20C 20 7 22.1 10 3.5 6.5 M2.5 1 - 106.61 CAD Cart       
MOP-25C 25 8 27.2 14 4 9 M3 1.5 - 125.23 CAD Cart       
MOP-32C 32 10 33.3 18 5 11 M4 2.5 - 159.26 CAD Cart       

Part Number Max. Bore Diameter
Max. Torque
Max. Rotational Frequency
Moment of
Max. Lateral Misalignment
Max. Angular
(g) *2
MOP-20C 8 0.7 1.4 31000 7.4×10-7 93 1.3 2 13
MOP-25C 10 1.2 2.4 25000 2.2×10-6 140 1.5 2 24
MOP-32C 14 2.8 5.6 19000 7.3×10-6 350 2 2 48

*1: Correction of rated torque and max. torque due to load fluctuation is not required. For more detailed information, please refer to Selection Guidelines.
*2: These are values with max. bore diameter.

Part Number Standard Bore Diameter D1・D2
5 6 8 10 11 12 14
MOP-20C - - - -
MOP-25C - - - - -
MOP-32C - - -

● All products are provided with hex socket head cap screw.
● Recommended tolerance for shaft diameters is h6 and h7.
● Bore and keyway modifications are available on request. Please take advantage of our modification services.
● For the shaft insertion amount to the coupling, see Mounting/maintenance. ⇒Mounting and Maintenance


Clamping Type


MOP-C_CCleanroom / Vacuum / Heat Resistant Couplings - Oldham Type (PEEK)


Hub A2017
Spacer PEEK (Polyether Ether Ketone)
Hex Socket Head Cap Screw SUSXM7

PEEK's color may vary depending on the lot or other matters.


  • Property
Low Particle
Low Outgas
Chemical Resistance
Allowable Misalignment
Electrical Insulation
Cleanroom Specification
Allowable Operating Temperature -20℃ to 120℃

◎: Excellent ○: Very good
△: Abrasion powder may be produced

  • This is an oldham type flexible coupling.
  • Cleanroom wash/cleanroom packing provided. It can be used in an environment or cleanroom where heat resistance and chemical resistance are required, such as FPD and semiconductor manufacturing equipment.
  • PEEK is adopted in the spacer. This is superior in heat resistance and chemical resistance, and the amount of outgas is ultralow.
  • Slippage of hubs and a spacer allows eccentricity and angular misalignment to be accepted.
  • The load on the shaft generated by misalignment is small and the burden on the shaft is reduced.


FPD manufacturing device / Semiconductor manufacturing device

Precautions for Use

In case of mounting on D-cut shaft, be careful about the position of the D-cut surface of the shaft. ⇒Mounting and Maintenance
There are sizes where the hex socket head bolt exceeds the outer diameter of the coupling and the rotating diameter is larger than the outer diameter. Please be careful of the interference of coupling. Rotation Diameter

PEEK's Chemical Resistance

Chemical Name PEEK
10% Hydrochloric Acid
10% Sulfuric Acid
50% Sulfuric Acid ×
10% Nitric Acid
50% Nitric Acid ×
50% Hydrofluoric Acid ×
10% Phosphoric Acid
Formic Acid
10% Acetic Acid
Citric Acid
Chromic Acid
Boric Acid
Methyl Alcohol
10% Sodium Hydroxide
10% Potassium Hydroxide
Calcium Hydroxide
Hydrogen Sulfide (gas)
Sulfur Dioxide
Ammonium Nitrate
Sodium Nitrate
Calcium Carbonate
Calcium Chloride
Magnesium Chloride
Magnesium Sulfate
Zinc Sulfate
Hydrogen Peroxide

○: Available △: Available depending on conditions ×: Not available
This is test data with a specimen used at room temperature (23°C).
Chemical resistance changes with performance conditions. Always carry out tests under performance conditions similar to actual conditions in advance.

PEEK's Physical Properties

Property Test Method unit PEEK
Tensile Strength D638 N/mm2 97
Tensile Elongation D638 % 65
Bending Strength D790 N/mm2 156
Bending Elastic Modulus D790 GPa 4.1
Izod Impact Value (with Notch) D256 J/m 94
Rockwell Hardness D785 R / M Scale M99
Deflection Temperature Under Load (1.82MPa) D648 °C 152
Combustibility UL94 - V-0
Dielectric Constant (106 Hz) D150 - 3.3
Dielectric Loss Tangent (106 Hz) D150 - 0.003
Volume Resistivity (x1014) D257 Ω・m 4.9
Insulation Breakdown Strength D149 MV/m 17
Arc Resistance D495 sec 23
Specific Gravity D792 - 1.30
Water Absorption (in 23°C Water × 24 h) D570 % 0.500
Content by Percentage of Glass Fiber - % 0

Analysis of Outgas

Unit : (v/v ppm)

Component Content
Inorganic Gas Hydrogen 500 or Less
Carbon Monoxide 500 or Less
Carbon Dioxide 500 or Less
Organic Gas Methane 5 or Less
Ethane 5 or Less
Ethylene 5 or Less
Propane 5 or Less
Acetylene 5 or Less
i-Butane 5 or Less
n-Butane 5 or Less
Propylene 5 or Less

Both inorganic gas and organic gas are not more than the lower limit of determined amount and are not detected.

  • Measurement Method
    Inorganic gas----Gas chromatography (TCD)
    Organic gas----Gas chromatography (FID)
  • Measurement Conditions
    Heating temperature----100°C

MOP-C_TTechnical Information

Eccentric Reaction Force

These are initial slippage load values of hubs and a spacer.
After running-in operation, the slippage load becomes small, the load on the shaft due to misalignment becomes lowered, and the burden on the shaft bearing is reduced.

MOP-C_TTechnical Information

Change in static torsional stiffness due to temperature

This is a value under the condition where the static torsional stiffness at 20°C is 100%.
The change of MOP-C in torsional stiffness due to temperature is small and the change in responsiveness is extremely small. If the unit is used under higher temperature, be careful about misalignment due to elongation or deflection of the shaft associated with thermal expansion.

MOP-C_TTechnical Information

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