|Part Name||Flexible Couplings - Serration - Type|
High Allowable Misalignment
|Hub Material||Sintered Metal|
|Shaft Fastening Method||Set Screw|
|Diameter||φ16 ～ φ32|
|Torque||0.5N・m ～ 3N・m|
|List||MSF-16 MSF-20 MSF-25 MSF-32|
No. 6: Thermal Cycling
Here we discuss thermal cycling, which is often an issue in semiconductor manufacturing equipment.
Jaw Type Couplings Lineup List
This is the lineup list of jaw-type couplings. Select the coupling required from the lineup list.
No. 5: Solving common problems inside equipment
In Part 5, we will introduce NBK products used in semiconductor manufacturing equipment interiors, as well as various examples of the resolution of issues such as vacuum, heat-resistance, isolation and so on.
About Shaft Couplings
This page introduces flanged shaft couplings. It provides a clear introduction to the features and structure of flexible shaft couplings, fixed shaft couplings and rubber shaft couplings.
Choosing the most suitable coupling
We also explain the basic points for selection of the "perfect couplings" to meet customer needs. If you have struggled with selecting the perfect coupling from the many available, this is a must-see.