Serration Type

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Part Name	Flexible Couplings - Serration - Type
Part Number	MSF
Feature	Low Cost High Allowable Misalignment Vibration Absorption
Size	Standard
Hub Material	Sintered Metal
Shaft Fastening Method	Set Screw
Diameter	φ16 ～ φ32
Torque	0.5N・m ～ 3N・m
CAD	CAD
Specifications	Specifications
List	MSF-16 MSF-20 MSF-25 MSF-32

Related products

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Part Name	Sleeves for MSF
Part Number	MSF-SLV
Feature	Sleeves for MSF
CAD	CAD
Specifications	Specifications
List	MSF-16-SLV MSF-20-SLV MSF-25-SLV MSF-32-SLV

Latest

No. ９: Increasing Throughput

Here we introduce products that help improve conveying speed and downsize equipment in order to increase throughput.

No. 6: Thermal Cycling

Here we discuss thermal cycling, which is often an issue in semiconductor manufacturing equipment.

Jaw Type Couplings Lineup List

This is the lineup list of jaw-type couplings. Select the coupling required from the lineup list.

No. 5: Solving common problems inside equipment

In Part 5, we will introduce NBK products used in semiconductor manufacturing equipment interiors, as well as various examples of the resolution of issues such as vacuum, heat-resistance, isolation and so on.

Helpful Resources

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Custom made

Special specifications

Couplings Bore and Keyway Additional Modification Service

Laser engraving service

Coupling Stainless Steel Screw Alteration Service

Handle Shaft Hole Processing Service

Scale Plate・Scale Sticker Cutting Service

No. 7: SEMI Standards

No. 6: Thermal Cycling

No. 5: Solving common problems inside equipment

Screws that will not affect communication are required 【Safety Measures/Precautionary Measures】

Tools that can be used even in locations where magnetization must be avoided are required【Workability/Maintenance】

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Choosing the most suitable coupling

Procedure of Selection

Procedure of Selection (Actuator)

Procedure of Selection

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No. ９: Increasing Throughput

No. 8: Preventing Part Fall-out

No. 6: Thermal Cycling

No. 5: Solving common problems inside equipment

No. 7: SEMI Standards

Screws that will not affect communication are required 【Safety Measures/Precautionary Measures】

No. 2: Vacuum environments

Hints for correctly using NBK products: Retractable revolving grip

Countermeasures for screw loosening are required 【Safety / precautionary measures】

Machining marks must be prevented 【Energy-saving / reduced work-hours】

Screws must be protected from chemicals 【Energy-saving / reduced work-hours】

Improvement points for FA Devices【Control Design】

Solving common issues with Machine Tools（Machining Center）

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No. 6: Thermal Cycling

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No. 5: Solving common problems inside equipment

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What are low profile screws? Find advantages, disadvantages, and usage examples explained here!

All you need to know about the roles and types of washers!

What are clamp levers? Here we explain the characteristics and usage methods that help streamline screw tightening!

Jaw Type Couplings Lineup List

Small Diameter Screws: M0.6 (S0.6) to M2.6 Lineup

What are low profile screws? Find advantages, disadvantages, and usage examples explained here!

All you need to know about the roles and types of washers!

What are clamp levers? Here we explain the characteristics and usage methods that help streamline screw tightening!

No. ９: Increasing Throughput

Vol.1　Thinking about "Galling and Seizing"

Vol.2　Explaining the Vocabulary of Screws

Vol.3　Functional Screw Surface Treatments Are Not Just for Corrosion Resistance

Vol.4　What are washers used for?

Vol.5　Varieties of SUS Screws