Slit Type
Image Flexible Couplings - Spiral Slit Type Flexible Couplings - Slit Type - Set Screw Type Flexible Couplings - Slit Type - Clamping Type Flexible Couplings - Slit Type - Set Screw Type Flexible Couplings - Slit Type - Clamping Type Flexible Couplings - Slit Type - Set Screw Type Flexible Couplings - Slit Type - Clamping Type Flexible Couplings - Slit Type - Set Screw + Key Type Flexible Couplings - Slit Type - Set Screw + Key Type
Part Name Flexible Couplings - Spiral Slit Type Flexible Couplings - Slit Type - Set Screw Type Flexible Couplings - Slit Type - Clamping Type Flexible Couplings - Slit Type - Set Screw Type Flexible Couplings - Slit Type - Clamping Type Flexible Couplings - Slit Type - Set Screw Type Flexible Couplings - Slit Type - Clamping Type Flexible Couplings - Slit Type - Set Screw + Key Type Flexible Couplings - Slit Type - Set Screw + Key Type
Part Number MSH MSX MSX-C MST MST-C MSTS MSTS-C MST-K MSTS-K
Feature Single-Piece Construction
Zero Backlash
Low reaction force		 Single-Piece
Construction
Zero Backlash
High Torsional
Stiffness		 Single-Piece
Construction
Zero Backlash
High Torsional
Stiffness		 Single-Piece
Construction
Zero Backlash		 Single-Piece
Construction
Zero Backlash		 Single-Piece
Construction
Zero Backlash
High Torsional
Stiffness		 Single-Piece
Construction
Zero Backlash
High Torsional
Stiffness		 Single-Piece
Construction
Zero Backlash		 Single-Piece
Construction
Zero Backlash
Size Standard Standard Standard Standard Standard Standard Standard Standard Standard
Hub Material Aluminum Alloy Aluminum Alloy Aluminum Alloy Aluminum Alloy Aluminum Alloy Stainless Steel Stainless Steel Aluminum Alloy Stainless Steel
Shaft Fastening Method Clamping Set Screw Clamping Set Screw Clamping Set Screw Clamping Set Screw + Key Set Screw + Key
Diameter φ8 ～ φ32 φ16 ～ φ44 φ16 ～ φ44 φ8 ～ φ63 φ12 ～ φ63 φ8 ～ φ63 φ12 ～ φ63 φ32 ～ φ63 φ32 ～ φ63
Torque - 0.5N・m ～ 9N・m 0.5N・m ～ 9N・m 0.1N・m ～ 32N・m 0.4N・m ～ 32N・m 0.2N・m ～ 35N・m 0.3N・m ～ 35N・m 4N・m ～ 32N・m 3.5N・m ～ 35N・m
CAD CAD CAD CAD CAD CAD CAD CAD CAD CAD
Specifications Specifications Specifications Specifications Specifications Specifications Specifications Specifications Specifications Specifications
List MSH-13C MSH-16C MSH-20C MSH-26C MSH-32C MSH-8 MSX-16 MSX-19 MSX-24 MSX-29 MSX-34 MSX-39 MSX-44 MSX-16C MSX-19C MSX-24C MSX-29C MSX-34C MSX-39C MSX-44C MST-12 MST-16 MST-20 MST-25 MST-32 MST-40 MST-50 MST-63 MST-8 MST-12C MST-16C MST-20C MST-25C MST-32C MST-40C MST-50C MST-63C MSTS-12 MSTS-16 MSTS-20 MSTS-25 MSTS-32 MSTS-40 MSTS-50 MSTS-63 MSTS-8 MSTS-12C MSTS-16C MSTS-20C MSTS-25C MSTS-32C MSTS-40C MSTS-50C MSTS-63C MST-32K MST-40K MST-50K MST-63K MSTS-32K MSTS-40K MSTS-50K MSTS-63K
Image Flexible Couplings - Slit Type - Set Screw Type Flexible Couplings - Slit Type - Set Screw Type Flexible Couplings - Slit Type - Clamping Type Flexible Couplings - Slit Type - Clamping Type Cleanroom / Vacuum / Heat Resistant Couplings - Slit Type (SUS316L) - Clamping Type Cleanroom / Vacuum / Heat Resistant Couplings - Slit Type (SUS316L) - Clamping Type Cleanroom / Vacuum / Heat Resistant Couplings - Slit Type (PEEK) - Clamping Type Coupling for Vacuum Variable Capacitor - Slit Type (PEEK) - Clamping Type
Part Name Flexible Couplings - Slit Type - Set Screw Type Flexible Couplings - Slit Type - Set Screw Type Flexible Couplings - Slit Type - Clamping Type Flexible Couplings - Slit Type - Clamping Type Cleanroom / Vacuum / Heat Resistant Couplings - Slit Type (SUS316L) - Clamping Type Cleanroom / Vacuum / Heat Resistant Couplings - Slit Type (SUS316L) - Clamping Type Cleanroom / Vacuum / Heat Resistant Couplings - Slit Type (PEEK) - Clamping Type Coupling for Vacuum Variable Capacitor - Slit Type (PEEK) - Clamping Type
Part Number MWS MWSS MWS-C MWSS-C XSTS-C XWSS-C MSXP-C MSXP-C-W-SP
Feature Single-Piece
Construction
Zero Backlash
Low Inertia		 Single-Piece
Construction
Zero Backlash
High Torque		 Single-Piece
Construction
Zero Backlash
Low Inertia		 Single-Piece
Construction
Zero Backlash
High Torque		 Clean
Low Particle
Chemical Resistance		 Clean
Low Particle
Chemical Resistance		 PEEK
Low Outgas		 Coupling for Vacuum Variable Capacitor
Size Short Short Short Short Standard Short Standard Long
Hub Material Aluminum Alloy Stainless Steel Aluminum Alloy Stainless Steel SUS316L SUS316L PEEK PEEK
Shaft Fastening Method Set Screw Set Screw Clamping Clamping Clamping Clamping Clamping Clamping
Diameter φ8 ～ φ32 φ8 ～ φ32 φ12 ～ φ32 φ12 ～ φ32 φ25 ～ φ63 φ25 ～ φ32 φ25 ～ φ36 φ25
Torque 0.1N・m ～ 4N・m 0.2N・m ～ 3.5N・m 0.4N・m ～ 4N・m 0.3N・m ～ 3.5N・m 2N・m ～ 35N・m 2N・m ～ 3.5N・m 0.7N・m ～ 1.5N・m 1.3N・m
CAD CAD CAD CAD CAD CAD CAD CAD CAD
Specifications Specifications Specifications Specifications Specifications Specifications Specifications Specifications Specifications
List MWS-12 MWS-16 MWS-20 MWS-25 MWS-32 MWS-8 MWSS-12 MWSS-16 MWSS-20 MWSS-25 MWSS-32 MWSS-8 MWS-12C MWS-16C MWS-20C MWS-25C MWS-32C MWSS-12C MWSS-16C MWSS-20C MWSS-25C MWSS-32C XSTS-25C XSTS-32C XSTS-40C XSTS-50C XSTS-63C XWSS-25C XWSS-32C MSXP-25C MSXP-30C MSXP-36C MSXP-25C-W40

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Part Name Photo Sensor Flange Damper Rolls
Part Number MPF MDR
Feature Photo Sensor Flange Damper for Stepping Motor
CAD CAD CAD
Specifications Specifications Specifications
List MPF-32 MPF-40 MPF-50 MDR-41 MDR-52 MDR-57

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No. ９: Increasing Throughput

No. ９: Increasing Throughput

Here we introduce products that help improve conveying speed and downsize equipment in order to increase throughput.

No. 6: Thermal Cycling

No. 6: Thermal Cycling

Here we discuss thermal cycling, which is often an issue in semiconductor manufacturing equipment.

Jaw Type Couplings Lineup List

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This is the lineup list of jaw-type couplings. Select the coupling required from the lineup list.

No. 5: Solving common problems inside equipment

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In Part 5, we will introduce NBK products used in semiconductor manufacturing equipment interiors, as well as various examples of the resolution of issues such as vacuum, heat-resistance, isolation and so on.

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High-Gain Rubber Type Coupling XG2

High-Gain Rubber Type Coupling XG2

This suppresses servo motor hunting and greatly shortens settling time. New NBK coupling XG2. Exhibits even higher responsivity than metal disk couplings. Contributes to improving productivity, such as suppressing speed unevenness during stepper motor operation.

About Shaft Couplings

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This page introduces flanged shaft couplings. It provides a clear introduction to the features and structure of flexible shaft couplings, fixed shaft couplings and rubber shaft couplings.

Choosing the most suitable coupling

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We also explain the basic points for selection of the "perfect couplings" to meet customer needs. If you have struggled with selecting the perfect coupling from the many available, this is a must-see.

About Couplings

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Coupling is a component used to connect a drive shaft and a driven part, for example, a motor shaft and a ball screw for the purpose of transmitting the torque.

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