What is thermal cycling?
Examples are ion generators in ion implantation equipment, light sources in lithography equipment, etc.
As well, coating and etching equipment may also reach temperatures of 200° to 400° when processing wafers.
The repeated changes of temperature in equipment of this kind are called thermal cycling.
NBK offers screws which can be used to handle high-temperature environments and thermal cycling.＜High-temperature environments＞
Screws withstanding high-temperature environments are available.
Tungsten and pure molybdenum materials boast high melting points (3683°C for tungsten, 2623°C for pure molybdenum).
Contact our customer service for other materials.
|Material||Tungsten||Tantalum||Inconel||Pure Molybdenum||Silicon Carbide (SiC)||Al2O3（99.5％ Alumina）||VESPEL SP-1
|Part Name||Slotted Cheese Head Machine Screws (Tungsten)||Hex Socket Head Cap Screws (Tantalum)||Socket Head Cap Screw -Inconel equiv||Hex Socket Head Cap Screws - Molybdenum||Slotted Pan Head Screws (Silicon Carbide)||Ceramic Hex Socket Head Cap Bolts||Plastic Screw - Socket Head Cap Screws - VESPEL（Grade：SP-1）
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＜High-temperature + vacuum environments＞
Degassing holes for vacuum equipment are machined on heat-resistant materials.
|Part Name||Hex Socket Head Cap Screws (Inconel equiv.)||Molybdenum Hex Socket Head Cap Screws with Ventilation Hole
Screws resistant to galling and seizing in thermal-cycling environments are available.
|Material||SUS316L||SUS316L||SUSXM7 (Equivalent to SUS304)||SUSXM7 (Equivalent to SUS304)||SUSXM7 (Equivalent to SUS304)||SUSXM7 (Equivalent to SUS304)||SUSXM7 (Equivalent to SUS304)
|Part Name||Hex Socket Head Cap Screws - SUS316L / Surface hardening treatment||Hex socket Head Cap Screws with Ventilation Hole / Surface Hardening Treatment||Hex Socket Head Cap Screws - MoS2 Coating||Hex Socket Head Cap Screws - Low Temperature Black Chrome||Hex Socket Head Cap Screws - PTFE Coating||Hex Socket Head Cap Screws - Gold Coating||Hex Socket Head Cap Screws - Fluorine Coating
|Click here for the lineup
Integrated washer type screws are available. Spring washers are used to absorb thermal expansion and help prevent loosening.
|Material||SUSXM7 (Equivalent to SUS304)||SUS316L||SUS316L
|Part Name||Hex Socket Head Cap Screws with Captive Washer and Ventilation Hole||Washer Integrated Hex Socket Head Cap Screws with Ventilation Hole - High Strength Stainless Steel||Washer Integrated Hex Socket Head Cap Screws - High Strength Stainless Steel
|Click here for the lineup|
Problem Solution Examples by Semiconductor Manufacturing ProcessProblem solution examples are introduced by semiconductor manufacturing process.
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