Date Published:Oct. 26. 2022
No. 6: Thermal Cycling
What is thermal cycling?
Examples are ion generators in ion implantation equipment, light sources in lithography equipment, etc.
As well, coating and etching equipment may also reach temperatures of 200° to 400° when processing wafers.
The repeated changes of temperature in equipment of this kind are called thermal cycling.
NBK offers screws which can be used to handle high-temperature environments and thermal cycling.＜High-temperature environments＞
Screws withstanding high-temperature environments are available.
Tungsten and pure molybdenum materials boast high melting points (3683°C for tungsten, 2623°C for pure molybdenum).
Contact our customer service for other materials.
|Material||Tungsten||Tantalum||Inconel||Pure Molybdenum||Silicon Carbide (SiC)||Al2O3（99.5％ Alumina）||VESPEL SP-1
|Part Name||Slotted Cheese Head Machine Screws (Tungsten)||Hex Socket Head Cap Screws (Tantalum)||Socket Head Cap Screw -Inconel equiv||Hex Socket Head Cap Screws - Molybdenum||Slotted Pan Head Screws (Silicon Carbide)||Ceramic Hex Socket Head Cap Bolts||Plastic Screw - Socket Head Cap Screws - VESPEL（Grade：SP-1）
|Click here for the lineup
＜High-temperature + vacuum environments＞
Degassing holes for vacuum equipment are machined on heat-resistant materials.
|Part Name||Hex Socket Head Cap Screws (Inconel equiv.)||Molybdenum Hex Socket Head Cap Screws with Ventilation Hole
Screws resistant to galling and seizing in thermal-cycling environments are available.
|Material||SUS316L||SUS316L||SUSXM7 (Equivalent to SUS304)||SUSXM7 (Equivalent to SUS304)||SUSXM7 (Equivalent to SUS304)||SUSXM7 (Equivalent to SUS304)||SUSXM7 (Equivalent to SUS304)
|Part Name||Hex Socket Head Cap Screws - SUS316L / Surface hardening treatment||Hex socket Head Cap Screws with Ventilation Hole / Surface Hardening Treatment||Hex Socket Head Cap Screws - MoS2 Coating||Hex Socket Head Cap Screws - Low Temperature Black Chrome||Hex Socket Head Cap Screws - PTFE Coating||Hex Socket Head Cap Screws - Gold Coating||Hex Socket Head Cap Screws - Fluorine Coating
|Click here for the lineup
Integrated washer type screws are available. Spring washers are used to absorb thermal expansion and help prevent loosening.
|Material||SUSXM7 (Equivalent to SUS304)||SUS316L||SUS316L
|Part Name||Hex Socket Head Cap Screws with Captive Washer and Ventilation Hole||Washer Integrated Hex Socket Head Cap Screws with Ventilation Hole - High Strength Stainless Steel||Washer Integrated Hex Socket Head Cap Screws - High Strength Stainless Steel
|Click here for the lineup|
Problem Solution Examples by Semiconductor Manufacturing ProcessProblem solution examples are introduced by semiconductor manufacturing process.
"The Semiconductor Industry and NBK" back numbersList here
Recommended Articles for You
No. 2: Vacuum environments
Vacuum technology is often used in semiconductor manufacturing equipment. A vacuum is not required for all equipment. A vacuum would mainly be required for equipment that uses plasma or an electron beam. In Part 2, we introduce some NBK products that are ideal for use in these vacuum environments!
No. 5: Solving common problems inside equipment
In Part 5, we will introduce NBK products used in semiconductor manufacturing equipment interiors, as well as various examples of the resolution of issues such as vacuum, heat-resistance, isolation and so on.
No. 8: Preventing Part Fall-out
Are you struggling with screw or washer fall-out during equipment assembly or maintenance?
Here we introduce products that can be used to prevent part fall-out.