NBK logo

Date Published:Oct. 26. 2022 Date Updated:Jul. 30. 2024

No. 6: Thermal Cycling

What is thermal cycling?

Depending on the specific equipment, the interior of semiconductor manufacturing equipment may reach high temperatures of 500° to 1000°.
Examples are ion generators in ion implantation equipment, light sources in lithography equipment, etc.
As well, coating and etching equipment may also reach temperatures of 200° to 400° when processing wafers.

The repeated changes of temperature in equipment of this kind are called thermal cycling.
Visualization of thermal cycling

NBK offers screws which can be used to handle high-temperature environments and thermal cycling.

<High-temperature environments>
Screws withstanding high-temperature environments are available.
Tungsten and pure molybdenum materials boast high melting points (3683°C for tungsten, 2623°C for pure molybdenum).
Contact our customer service for other materials.
  SNCW_index  SNSI_ind SNSM_ind SICX-SX_index SCX-C_ind SPD-C_ind
Material Tungsten Tantalum Inconel Pure Molybdenum Silicon Carbide (SiC) Al2O3(99.5% Alumina) VESPEL SP-1
Part Name Slotted Cheese Head Machine Screws (Tungsten) Hex Socket Head Cap Screws (Tantalum) Socket Head Cap Screw -Inconel equiv Hex Socket Head Cap Screws - Molybdenum Slotted Pan Head Screws (Silicon Carbide) Ceramic Hex Socket Head Cap Bolts Plastic Screw - Socket Head Cap Screws - VESPEL(Grade:SP-1)
Part Number SNCW SNSTA SNSI SNSM SICX-SX SCX-C SPD-C
  Click here for the lineup

<High-temperature + vacuum environments>
Degassing holes for vacuum equipment are machined on heat-resistant materials.
  SVSI_index SVSM_index
Material Inconel Pure Molybdenum
Part Name Hex Socket Head Cap Screws (Inconel equiv.) Molybdenum Hex Socket Head Cap Screws with Ventilation Hole
Part Number SVSI SVSM

<Seizing prevention>
Screws resistant to galling and seizing in thermal-cycling environments are available.
  SNSL-PN_ind SVSL-PN_index SNSS-MO_ind SNSS-RY_ind SNSS-TF_ind SNSS-AUS_ind SNSS-FC_ind
Material SUS316L SUS316L SUSXM7 (Equivalent to SUS304) SUSXM7 (Equivalent to SUS304) SUSXM7 (Equivalent to SUS304) SUSXM7 (Equivalent to SUS304) SUSXM7 (Equivalent to SUS304)
Part Name Hex Socket Head Cap Screws - SUS316L / Surface hardening treatment Hex socket Head Cap Screws with Ventilation Hole / Surface Hardening Treatment Hex Socket Head Cap Screws - MoS2 Coating Hex Socket Head Cap Screws - Low Temperature Black Chrome Hex Socket Head Cap Screws - PTFE Coating Hex Socket Head Cap Screws - Gold Coating Hex Socket Head Cap Screws - Fluorine Coating
Part Number SNSL-PN SVSL-PN SNSS-MO SNSS-RY SNSS-TF SNSS-AUS SNSS-FC
  Click here for the lineup

<Loosening prevention>
Integrated washer type screws are available. Spring washers are used to absorb thermal expansion and help prevent loosening.
  SVSQS_ind  SVSQLG_index SNSQLG_index  
Material SUSXM7 (Equivalent to SUS304) SUS316L SUS316L SUSXM7 (Equivalent to SUS304) SUSXM7 (Equivalent to SUS304)
Part Name Hex Socket Head Cap Screws with Captive Washer and Ventilation Hole Washer Integrated Hex Socket Head Cap Screws with Ventilation Hole - High Strength Stainless Steel Washer Integrated Hex Socket Head Cap Screws - High Strength Stainless Steel Hex Socket Head Cap Screws with Captive Washers(I=3) Phillips Cross Recessed Pan Head Machine Screws with Captive Washers(I=3)
Part Number SVSQS SVSQLG SNSQLG SNSQS SNPI3S
  Click here for the lineup

  SNSI3T    
Material TW340 (Grade 2 Titanium) Equivalent to SUS304 Equivalent to SUS304
Part Name Titanium Hex Socket Head Cap Screws with Captive Washers(I=3) Hexagon Head Screws with Captive Washer(P=2) Hexagon Head Screws with Captive Washer(P=3)
Part Number SNSI3T SNHP2S SNHP3S
  Click here for the lineup

Problem Solution Examples by Semiconductor Manufacturing Process

Problem solution examples are introduced by semiconductor manufacturing process.
Pre-process here
Post-process here

"The Semiconductor Industry and NBK" back numbers

List here

Product Introduction Issue/case studies Improved productivity/workability Compact/space-saving/lightweight High strength/high rigidity Heat resistance/corrosion resistance Cleanroom/vacuum/non-magnetic Semiconductor Manufacturing Equipment The Semiconductor Industry and NBK Couplings Special Screws Machine Elements