Date Published:Oct. 26. 2022 Date Updated:Jul. 30. 2024
No. 6: Thermal Cycling
What is thermal cycling?
Depending on the specific equipment, the interior of semiconductor manufacturing equipment may reach high temperatures of 500° to 1000°.
Examples are ion generators in ion implantation equipment, light sources in lithography equipment, etc.
As well, coating and etching equipment may also reach temperatures of 200° to 400° when processing wafers.
The repeated changes of temperature in equipment of this kind are called thermal cycling.
Examples are ion generators in ion implantation equipment, light sources in lithography equipment, etc.
As well, coating and etching equipment may also reach temperatures of 200° to 400° when processing wafers.
The repeated changes of temperature in equipment of this kind are called thermal cycling.
NBK offers screws which can be used to handle high-temperature environments and thermal cycling.
<High-temperature environments>Screws withstanding high-temperature environments are available.
Tungsten and pure molybdenum materials boast high melting points (3683°C for tungsten, 2623°C for pure molybdenum).
Contact our customer service for other materials.
Material | Tungsten | Tantalum | Inconel | Pure Molybdenum | Silicon Carbide (SiC) | Al2O3(99.5% Alumina) | VESPEL SP-1 |
---|---|---|---|---|---|---|---|
Part Name | Slotted Cheese Head Machine Screws (Tungsten) | Hex Socket Head Cap Screws (Tantalum) | Socket Head Cap Screw -Inconel equiv | Hex Socket Head Cap Screws - Molybdenum | Slotted Pan Head Screws (Silicon Carbide) | Ceramic Hex Socket Head Cap Bolts | Plastic Screw - Socket Head Cap Screws - VESPEL(Grade:SP-1) |
Part Number | SNCW | SNSTA | SNSI | SNSM | SICX-SX | SCX-C | SPD-C |
Click here for the lineup |
<High-temperature + vacuum environments>
Degassing holes for vacuum equipment are machined on heat-resistant materials.
Material | Inconel | Pure Molybdenum |
---|---|---|
Part Name | Hex Socket Head Cap Screws (Inconel equiv.) | Molybdenum Hex Socket Head Cap Screws with Ventilation Hole |
Part Number | SVSI | SVSM |
<Seizing prevention>
Screws resistant to galling and seizing in thermal-cycling environments are available.
Material | SUS316L | SUS316L | SUSXM7 (Equivalent to SUS304) | SUSXM7 (Equivalent to SUS304) | SUSXM7 (Equivalent to SUS304) | SUSXM7 (Equivalent to SUS304) | SUSXM7 (Equivalent to SUS304) |
---|---|---|---|---|---|---|---|
Part Name | Hex Socket Head Cap Screws - SUS316L / Surface hardening treatment | Hex socket Head Cap Screws with Ventilation Hole / Surface Hardening Treatment | Hex Socket Head Cap Screws - MoS2 Coating | Hex Socket Head Cap Screws - Low Temperature Black Chrome | Hex Socket Head Cap Screws - PTFE Coating | Hex Socket Head Cap Screws - Gold Coating | Hex Socket Head Cap Screws - Fluorine Coating |
Part Number | SNSL-PN | SVSL-PN | SNSS-MO | SNSS-RY | SNSS-TF | SNSS-AUS | SNSS-FC |
Click here for the lineup |
<Loosening prevention>
Integrated washer type screws are available. Spring washers are used to absorb thermal expansion and help prevent loosening.
Material | SUSXM7 (Equivalent to SUS304) | SUS316L | SUS316L | SUSXM7 (Equivalent to SUS304) | SUSXM7 (Equivalent to SUS304) |
---|---|---|---|---|---|
Part Name | Hex Socket Head Cap Screws with Captive Washer and Ventilation Hole | Washer Integrated Hex Socket Head Cap Screws with Ventilation Hole - High Strength Stainless Steel | Washer Integrated Hex Socket Head Cap Screws - High Strength Stainless Steel | Hex Socket Head Cap Screws with Captive Washers(I=3) | Phillips Cross Recessed Pan Head Machine Screws with Captive Washers(I=3) |
Part Number | SVSQS | SVSQLG | SNSQLG | SNSQS | SNPI3S |
Click here for the lineup |
Material | TW340 (Grade 2 Titanium) | Equivalent to SUS304 | Equivalent to SUS304 |
---|---|---|---|
Part Name | Titanium Hex Socket Head Cap Screws with Captive Washers(I=3) | Hexagon Head Screws with Captive Washer(P=2) | Hexagon Head Screws with Captive Washer(P=3) |
Part Number | SNSI3T | SNHP2S | SNHP3S |
Click here for the lineup |
Problem Solution Examples by Semiconductor Manufacturing Process
Problem solution examples are introduced by semiconductor manufacturing process.Pre-process here
Post-process here
"The Semiconductor Industry and NBK" back numbers
List here
Product Introduction
Issue/case studies
Improved productivity/workability
Compact/space-saving/lightweight
High strength/high rigidity
Heat resistance/corrosion resistance
Cleanroom/vacuum/non-magnetic
Semiconductor Manufacturing Equipment
The Semiconductor Industry and NBK
Couplings
Special Screws
Machine Elements