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Date Published:May. 10. 2020 Date Updated:Oct. 07. 2024

Solving common issues with Semiconductor Manufacturing Equipment(Pre-Process)

Wafer cleaning machinery

Cleaning process

Component corrosion prevention is required

Screws with superior chemical resistance can be selected to withstand the environment within equipment where chemicals are applied.

Characteristics required for special screws:Chemical resistance


Chemical resistance

Heat resistance

Non-Magnetic

Recommended product

Resin Screws

 

Resin Screws

SUS316L Screws

SNSL

Hastelloy*1 Screws

 

SNSH-C22 ,SNSH-C276 ,SSHH-C22

Ceramic Screws

 

SCX-C ,SCX-H ,SCX-N

Vespel*2 Screws

 

SPD-C ,SPD-H ,SPDC-C ,SPDC-H

Screws with PFA Coating for Head


 

SNHS-HTF

*1:Hastelloy is a registered trademark of Haynes International, Inc.
*2:VESPEL is a registered trademark of DuPont.


See here for further details about chemical-resistant screws▶

Oxidation/diffusion equipment

Heat treatment/oxidation/diffusion process

Resistance to high temperatures and chemicals is required

For environments where various gases are used at high temperatures, select screws with excellent heat resistance and chemical resistance.

Characteristics required for special screws:Heat resistance Chemical resistance


Heat resistance

Chemical resistance

Recommended product

Inconel*1 Screws

SNSI

Hastelloy*2 Screws

SNSH-C22 ,SNSH-C276 ,SSHH-C22

MAT21*3Screws

 

SNSMT

*1:Inconel is a registered trademark of Special Metals Corporation.
*2:Hastelloy is a registered trademark of Haynes International, Inc.
*3:MAT and MAT21 are registered trademarks of Proterial, Ltd.


Coater/developer

Film formation process

Improved production capacity is required

Use a high-rigidity coupling for the highspeed rotation required for photoresist film formation on the wafer.

Characteristics required for couplings:High rigidity


Recommended product

Disk Couplings

XHW-C


Component corrosion prevention is required

Screws with superior chemical resistance can be selected to withstand the environment within equipment where chemicals are applied.

Characteristics required for special screws:Chemical resistance


Heat resistance

Chemical resistance

Recommended product

Inconel Screws

SNSI

*1:Inconel is a registered trademark of Special Metals Corporation.


Semiconductor lithography equipment

Photolithography process

Improved equipment accuracy is required

Even the small screws used at joints enable exposure accuracy to be improved by suppressing the influence of reflection.

Characteristics required for special screws:Anti-reflection


Anti reflection

Chemical resistance

Galling/Seizing Prevention

Recommended product

Low Temperature Black Chrome Treated Screws

SNSS-RY

Black Stainless Steel Screws

SNSS-BK


Anti-reflection screws See here for further details▶


Etching equipment

Etching process

Resistance to high temperatures and chemicals is required

For environments where various gases and solvents are used at high temperatures, select screws with excellent heat resistance and chemical resistance.

Characteristics required for special screws:Heat resistance Chemical resistance


Heat resistance

Chemical resistance

Vacuum

Non-Magnetic

High strength

Lightweight

Seizing Prevention

Recommended product

Ceramic Screws

         

SCX-C ,SCX-H ,SCX-N

Screws with Ceramic Cover Cap

 


     

SCAP-CE

Hastelloy*1 Screws

         

SNSH-C22 ,SNSH-C276 ,SSHH-C22

SUS316L Screws

 

     

SNSL

Titanium Screws

 

 

 

SNSTG

Surface Hardened Screws


       

SNSL-PN

*1:Hastelloy is a registered trademark of Haynes International, Inc.


Heat-resistant screws▶

Chemical-resistant screws▶

Motor damage must be prevented

Components with excellent insulating properties are required as a countermeasure to prevent energization from vacuum variable capacitors.

Characteristics required for couplings:Insulating properties


Recommended product

Coupling for Vacuum Variable Capacitor

MSXP-C-W-SP


Ion implantation equipment

Ion implantation process

Improved degree of vacuum is required

The degree of vacuum can be further improved by removing air trapped within the screw hole.

Characteristics required for special screws:Vacuum


 Vacuum

 Recommended product

Screws with Ventilation Hole

Screw for Vacuum Equipment


A screw that doesn't gall at high temperatures is required

We have screws that prevent galling due to heat cycling in environments of 1000°C or higher.

Characteristics required for special screws:Heat resistance


Heat resistance

Seizing Prevention

Recommended product

Surface Hardened Screws

Surface Hardened Screws


Improved equipment accuracy is required

Non-magnetic components should be used for the fasteners to prevent ions from deflection due to the magnetic properties of the part.

Characteristics required for special screws:Non-Magnetic


Non-Magnetic

Chemical resistance

High strength

Lightweight

Recommended product

Phosphor Bronze Screw


 
 

SNSP

Titanium Screw

SNST


Film deposition equipment/ sputtering equipment

Film formation process

Motor damage must be prevented

Components with excellent insulating properties are required as a countermeasure to prevent energization from vacuum variable capacitors.

Characteristics required for couplings:Insulating properties


 Recommended product

Couplings for Vacuum Variable Capacitor

MSXP-C-W-SP


Resistance to high temperatures and chemicals is required

For environments where various gases are used at high temperatures, select screws with excellent heat resistance and chemical resistance.

Characteristics required for special screws:Heat resistance Chemical resistance


Heat resistance

Chemical resistance

Non-Magnetic

High strength

Lightweight

Recommended product

Ceramic Screws

     

SCX-C ,SCX-H ,SCX-N

SUS316L Screws

   

SNSL

Molybdenum Screws

       

SNSM

Hastelloy*1 Screws

     

SNSH-C22 ,SNSH-C276 ,SSHH-C22

Nickel Screws

     

SNSN

Inconel*2 Screws

     

SNSI

Titanium Screws

 

SNST

*1:Hastelloy is a registered trademark of Haynes International, Inc.
*2:Inconel is a registered trademark of Special Metals Corporation.


Heat-resistant screws▶

Chemical-resistant screws▶

Improved degree of vacuum is required

The degree of vacuum can be further improved by removing air trapped within the screw hole.

Characteristics required for special screws:Vacuum


Vacuum

Recommended product

Screws with Ventilation Hole

Screw for Vacuum Equipment


Physical inspection equipment

Inspection/evaluation process

Improved degree of vacuum is required

The degree of vacuum can be further improved by removing air trapped within the screw hole.

Characteristics required for special screws:Vacuum


 Vacuum

 Recommended product

Screws with Ventilation Hole

Screw for Vacuum Equipment


Increased inspection accuracy is required

Characteristics required for special screws:Non-magnetic


Non-magnetic

Heat resistance

Chemical resistance

High strength

Lightweight

Recommended product

Resin Screws:PPS

   

SPS-C , SPS-F  ,SPS-H  ,SPS-LC  ,SPS-N  ,SPS-P  ,SPS-W

Titanium Screws


SNST

Phosphor Bronze Screws


     

SNSP


See here for further details about non-magnetic screws▶

Countermeasures for screw loosening and contamination are required

A lineup of non-magnetic hex socket head cap screws is available.
Compared to slotted sockets and cross-recessed sockets, the hex socket head cap shape is less likely to undergo cam-out, making it effective in preventing contamination.
The high strength of 64 titanium also enables tightening at higher torques, making it effective as a loosening countermeasure as well.
The lineup of 64 titanium and phosphor bronze hex socket head cap screws runs from M2 up.

Image SNSTG SNSP
Part Name Hex Socket Head Cap Screws
- High Intensity Titanium Alloy

Hex Socket Head Cap Screws
- Phosphor Bronze

Part Number SNSTG
SNSP
Material 64 Titanium C5191(Phosphor Bronze)
Thread Size M2~M10 M2~M8

 

Miniature Screws▶

Electrical inspection equipment

Inspection/evaluation process

Improved equipment accuracy is required

Realizes even greater servomotor gain, leading to reduced stabilization time.

Characteristics required for drive components:High gain support


 Recommended product

High-gain Rubber Couplings

XGT2


More compact equipment is required

We have small diameter screws of M2.6 and less, including S0.6 up and M1 up.

Characteristics required for special screws:Space-saving


Recommended product

Miniature Screw

Miniature Screw


 

Issue/case studies Improved productivity/workability Vibration prevention/high precision Compact/space-saving/lightweight High strength/high rigidity Heat resistance/corrosion resistance Semiconductor Manufacturing Equipment Solution samples Couplings Special Screws