Date Published:May. 10. 2020 Date Updated:Oct. 07. 2024
Solving common issues with Semiconductor Manufacturing Equipment(Pre-Process)
Wafer cleaning machinery
Cleaning process
Component corrosion prevention is required
Screws with superior chemical resistance can be selected to withstand the environment within equipment where chemicals are applied.
Characteristics required for special screws:Chemical resistance
Chemical resistance |
Heat resistance |
Non-Magnetic |
Recommended product |
|
---|---|---|---|---|
Resin Screws |
○ |
|||
SUS316L Screws |
○ |
○ |
○ |
|
Hastelloy*1 Screws |
○ |
○ |
||
Ceramic Screws |
○ |
○ |
||
Vespel*2 Screws |
○ |
○ |
||
Screws with PFA Coating for Head |
○ |
*1:Hastelloy is a registered trademark of Haynes International, Inc.
*2:VESPEL is a registered trademark of DuPont.
See here for further details about chemical-resistant screws▶
Oxidation/diffusion equipment
Heat treatment/oxidation/diffusion process
Resistance to high temperatures and chemicals is required
For environments where various gases are used at high temperatures, select screws with excellent heat resistance and chemical resistance.
Characteristics required for special screws:Heat resistance Chemical resistance
Heat resistance |
Chemical resistance |
Recommended product |
|
---|---|---|---|
Inconel*1 Screws |
○ |
○ |
|
Hastelloy*2 Screws |
○ |
○ |
|
MAT21*3Screws |
○ |
*1:Inconel is a registered trademark of Special Metals Corporation.
*2:Hastelloy is a registered trademark of Haynes International, Inc.
*3:MAT and MAT21 are registered trademarks of Proterial, Ltd.
Coater/developer
Film formation process
Improved production capacity is required
Use a high-rigidity coupling for the highspeed rotation required for photoresist film formation on the wafer.
Characteristics required for couplings:High rigidity
Recommended product |
|
---|---|
Disk Couplings |
Component corrosion prevention is required
Screws with superior chemical resistance can be selected to withstand the environment within equipment where chemicals are applied.
Characteristics required for special screws:Chemical resistance
Heat resistance |
Chemical resistance |
Recommended product |
|
---|---|---|---|
Inconel Screws |
○ |
○ |
*1:Inconel is a registered trademark of Special Metals Corporation.
Semiconductor lithography equipment
Photolithography process
Improved equipment accuracy is required
Even the small screws used at joints enable exposure accuracy to be improved by suppressing the influence of reflection.
Characteristics required for special screws:Anti-reflection
Anti reflection |
Chemical resistance |
Galling/Seizing Prevention |
Recommended product |
|
---|---|---|---|---|
Low Temperature Black Chrome Treated Screws |
○ |
○ |
○ |
|
Black Stainless Steel Screws |
○ |
Anti-reflection screws See here for further details▶
Etching equipment
Etching process
Resistance to high temperatures and chemicals is required
For environments where various gases and solvents are used at high temperatures, select screws with excellent heat resistance and chemical resistance.
Characteristics required for special screws:Heat resistance Chemical resistance
Heat resistance |
Chemical resistance |
Vacuum |
Non-Magnetic |
High strength |
Lightweight |
Seizing Prevention |
Recommended product |
|
---|---|---|---|---|---|---|---|---|
Ceramic Screws |
○ |
○ |
||||||
Screws with Ceramic Cover Cap |
|
○ |
○ |
|||||
Hastelloy*1 Screws |
○ |
○ |
||||||
SUS316L Screws |
○ |
○ |
○ |
|||||
Titanium Screws |
|
○ |
○ |
○ |
○ |
|||
Surface Hardened Screws |
○ |
○ |
*1:Hastelloy is a registered trademark of Haynes International, Inc.
Motor damage must be prevented
Components with excellent insulating properties are required as a countermeasure to prevent energization from vacuum variable capacitors.
Characteristics required for couplings:Insulating properties
Recommended product |
|
---|---|
Coupling for Vacuum Variable Capacitor |
Ion implantation equipment
Ion implantation process
Improved degree of vacuum is required
The degree of vacuum can be further improved by removing air trapped within the screw hole.
Characteristics required for special screws:Vacuum
Vacuum |
Recommended product |
|
---|---|---|
Screws with Ventilation Hole |
○ |
A screw that doesn't gall at high temperatures is required
We have screws that prevent galling due to heat cycling in environments of 1000°C or higher.
Characteristics required for special screws:Heat resistance
Heat resistance |
Seizing Prevention |
Recommended product |
|
---|---|---|---|
Surface Hardened Screws |
○ |
○ |
Improved equipment accuracy is required
Non-magnetic components should be used for the fasteners to prevent ions from deflection due to the magnetic properties of the part.
Characteristics required for special screws:Non-Magnetic
Non-Magnetic |
Chemical resistance |
High strength |
Lightweight |
Recommended product |
|
---|---|---|---|---|---|
Phosphor Bronze Screw |
○ |
|
|
||
Titanium Screw |
○ |
○ |
○ |
○ |
Film deposition equipment/ sputtering equipment
Film formation process
Motor damage must be prevented
Components with excellent insulating properties are required as a countermeasure to prevent energization from vacuum variable capacitors.
Characteristics required for couplings:Insulating properties
Recommended product |
|
---|---|
Couplings for Vacuum Variable Capacitor |
Resistance to high temperatures and chemicals is required
For environments where various gases are used at high temperatures, select screws with excellent heat resistance and chemical resistance.
Characteristics required for special screws:Heat resistance Chemical resistance
Heat resistance |
Chemical resistance |
Non-Magnetic |
High strength |
Lightweight |
Recommended product |
|
---|---|---|---|---|---|---|
Ceramic Screws |
○ |
○ |
||||
SUS316L Screws |
○ |
○ |
○ |
|||
Molybdenum Screws |
○ |
|||||
Hastelloy*1 Screws |
○ |
○ |
||||
Nickel Screws |
○ |
○ |
||||
Inconel*2 Screws |
○ |
○ |
||||
Titanium Screws |
|
○ |
○ |
○ |
○ |
*1:Hastelloy is a registered trademark of Haynes International, Inc.
*2:Inconel is a registered trademark of Special Metals Corporation.
Improved degree of vacuum is required
The degree of vacuum can be further improved by removing air trapped within the screw hole.
Characteristics required for special screws:Vacuum
Vacuum |
Recommended product |
|
---|---|---|
Screws with Ventilation Hole |
○ |
Physical inspection equipment
Inspection/evaluation process
Improved degree of vacuum is required
The degree of vacuum can be further improved by removing air trapped within the screw hole.
Characteristics required for special screws:Vacuum
Vacuum |
Recommended product |
|
---|---|---|
Screws with Ventilation Hole |
○ |
Increased inspection accuracy is required
Characteristics required for special screws:Non-magnetic
Non-magnetic |
Heat resistance |
Chemical resistance |
High strength |
Lightweight |
Recommended product |
|
---|---|---|---|---|---|---|
Resin Screws:PPS |
○ |
○ |
○ |
|||
Titanium Screws |
○ |
|
○ |
○ |
○ |
|
Phosphor Bronze Screws |
○ |
See here for further details about non-magnetic screws▶
Countermeasures for screw loosening and contamination are required
A lineup of non-magnetic hex socket head cap screws is available.
Compared to slotted sockets and cross-recessed sockets, the hex socket head cap shape is less likely to undergo cam-out, making it effective in preventing contamination.
The high strength of 64 titanium also enables tightening at higher torques, making it effective as a loosening countermeasure as well.
The lineup of 64 titanium and phosphor bronze hex socket head cap screws runs from M2 up.
Image | ||||
---|---|---|---|---|
Part Name | Hex Socket Head Cap Screws - High Intensity Titanium Alloy |
Hex Socket Head Cap Screws - Phosphor Bronze |
||
Part Number | SNSTG |
SNSP |
||
Material | 64 Titanium | C5191(Phosphor Bronze) | ||
Thread Size | M2~M10 | M2~M8 |
Electrical inspection equipment
Inspection/evaluation process
Improved equipment accuracy is required
Realizes even greater servomotor gain, leading to reduced stabilization time.
Characteristics required for drive components:High gain support
Recommended product |
|
---|---|
High-gain Rubber Couplings |
More compact equipment is required
We have small diameter screws of M2.6 and less, including S0.6 up and M1 up.
Characteristics required for special screws:Space-saving
Recommended product |
|
---|---|
Miniature Screw |