Date Published:Jun. 17. 2022 Date Updated:Oct. 07. 2024
No. 3: Process gas and wafer cleaning agent
Process gases (a special kind of gas) and cleaning agents (for removing impurities) are often used in semiconductor manufacturing processes.
Our silicon carbide (SiC) test data is freely available, with regard to these highly corrosive chemical liquids.
Our silicon carbide (SiC) test data is freely available, with regard to these highly corrosive chemical liquids.
What are process gases?
Inert gases and special gases (collectively referred to as "process gases") are often used in semiconductor manufacturing processes including the film formation and etching processes.
Some gases can even corrode stainless steel materials such as SUS304.
＜Examples of process gases＞
Some gases can even corrode stainless steel materials such as SUS304.
＜Examples of process gases＞
| Monosilane | Silicon tetrachloride | Silicon tetrafluoride | CFC-116 | Phosphorus pentafluoride |
| Arsine | Disilane | CFC-218 | CFC-32 | Tungsten hexafluoride |
| Phosphine | Boron trifluoride | Hydrogen bromide | Nitrous oxide | CFC-22 |
| Diborane | Boron trichloride | Chlorine | Trichlorosilane | CFC-123 |
| Germane | Hydrogen chloride | Chlorine trifluoride | Titanium tetrachloride | |
| Dichlorosilane | Ammonia | CFC-14 | Hydrogen fluoride | |
| Hydrogen selenide | Nitrogen trifluoride | CFC-23 | Phosphorus trifluoride |
What are wafer cleaning agents?
There are also processes where special cleaning agents are used to clean dirt and minute impurities from wafers.
Cleaning agents such as SPM (sulfuric acid hydrogen peroxide water solution) and FPM (hydrofluoric acid hydrogen peroxide water solution) may even dissolve stainless steel and other metals.
＜Examples of cleaning agents＞
SC-1 (ammonia hydrogen peroxide water solution)
SC-2 (hydrochloric acid hydrogen peroxide water solution)
SPM (sulfuric acid hydrogen peroxide water solution)
FPM (hydrofluoric acid hydrogen peroxide water solution)
BHF (buffered hydrofluoric acid solution)
Cleaning agents such as SPM (sulfuric acid hydrogen peroxide water solution) and FPM (hydrofluoric acid hydrogen peroxide water solution) may even dissolve stainless steel and other metals.
＜Examples of cleaning agents＞
SC-1 (ammonia hydrogen peroxide water solution)
SC-2 (hydrochloric acid hydrogen peroxide water solution)
SPM (sulfuric acid hydrogen peroxide water solution)
FPM (hydrofluoric acid hydrogen peroxide water solution)
BHF (buffered hydrofluoric acid solution)
NBK offers chemical resistant screws with excellent corrosion resistance.
They can be used even in environments where they may be exposed to process gas or wafer cleaning agents.See here for our full lineup of chemical resistant screws
*Chemical resistance changes with usage conditions. Always carry out tests under performance conditions similar to actual conditions in advance.
Chemical Resistant Screws
Metallic |
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| Material | Tantalum | MAT21＊1 | Hastelloy＊2C-22 | Hastelloy＊2C-276 | Inconel＊3 | Nickel |
| Part Name | Hex Socket Head Cap Screws (Tantalum) | Hex Socket Head Cap Screws (MAT21＊1) | Socket Head Cap Screw -Hastelloy＊2 C-22 equiv. | Socket Head Cap Screw -Hastelloy＊2 C-276 equiv. | Socket Head Cap Screw -Inconel＊3 equiv. | Hex Socket Head Cap Screws - Nickel |
| Part Number | SNSTA | SNSMT | SNSH-C22 | SNSH-C276 | SNSI | SNSN |
| Click here for the lineup | Click here for the lineup | |||||
＊2：Hastelloy is a registered trademark of Haynes International, Inc.
＊3：Inconel is a registered trademark of Special Metals Corporation.
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| Material | SUS316L | SUS310S | Titanium |
| Part Name | Socket Head Cap Screws - SUS316L | Socket Head Cap Screws - SUS310S | Hex Socket Head Cap Screws - High Intensity Titanium Alloy |
| Part Number | SNSL | SNSJ | SNSTG |
| Click here for the lineup | Click here for the lineup | ||
Ceramic/resin
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| Material | Silicon Carbide (SiC) | Al2O3（99.5％ Alumina） | PEEK GF30 | PEEK | PTFE | PFA (Perfluoroalkoxy Alkane) |
| Part Name | Slotted Pan Head Screws (Silicon Carbide) | Ceramic Hex Socket Head Cap Bolts | Plastic Screws - Hex Socket Head Cap Screws - PEEK GF30 | Plastic Screws - Cross Recessed Pan Head Machine Screws - PEEK | Plastic Screw - Hex Head Screws - PTFE | Plastic Screws - Hex Head Screws - PFA |
| Part Number | SICX-SX | SCX-C | SPEG-C | SPE-P | SPT-H | SPFA-H |
| Click here for the lineup | Click here for the lineup | |||||
Our silicon carbide (SiC) chemical resistance test data is freely available.
Special Shape
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| Material | Al2O3（99.5％ Alumina） | PTFE（Polytetrafluoroethylene） | SUSXM7 (Equivalent to SUS304) | SUSXM7（Equivalent to SUS304）PTFE Coating (Head Only) |
| Part Name | Cover Caps | Cover Caps - PTFE | Socket Head Cap Screws for Cover Caps | Hex Head Screws - PFA Coating for Head |
| Part Number | SCAP-CE | SCAP-PT | SNCPS | SNHS-HTF |
| Click here for the lineup | Click here for the lineup | |||
Problem Solution Examples by Semiconductor Manufacturing Process
Problem solution examples are introduced by semiconductor manufacturing process.Pre-process here
Post-process here
Product Introduction
Glossary
Heat resistance/corrosion resistance
Cleanroom/vacuum/non-magnetic
Semiconductor Manufacturing Equipment
The Semiconductor Industry and NBK
Special Screws
