Types of vacuums

NBK has a range of products ideal for use in vacuum environments

Vacuum Application Screws

Screws and washers that support the evacuation of gas trapped in the bottom of screw holes or drilled holes are available.The ventilation holes on NBK screws for vacuum equipment are made using a method that has little effect on metal structure.
They can suppress brittle fractures during use and the generation of outgas in vacuum environments.

＜Extensive lineup＞    Click here for our full lineup of screws for vacuum equipment
・Low Outgas
Special chemical polishing is used to improve surface roughness. Outgas quantity is extremely low.

Material	SUSXM7 (SUS304相当)	Titanium
Part Name	Socket Head Cap Screws with Ventilation Hole	Hex Socket Head Cap Screws with Ventilation Hole - Titanium	Hex Socket Head Cap Screw with Special Low Profile （Titanium, with Ventilation Hole）	Phillips Cross Recessed Flat Head Titanium Machine Screws （with Ventilation Hole）	Phillips Cross Recessed Pan Head Titanium Machine Screws （with Ventilation Hole）	Titanium Hex Socket Head Cap Screws with Captive Washers	Titanium Hex Socket Head Cap Screws with Captive Washers
Part Number	SVSS-PC	SVST	SVSHT	SVFT	SVPT	SNSI1T	SNSI3T
	Click here for the lineup

・Various materials
A wide lineup of materials is available, including highly corrosion resistant Inconel (equivalent) and Hastelloy (equivalent), and non-magnetic titanium.

Material	SUS304･SUSXM7 （Equivalent to SUS304)			SUS316L
Part Name	Socket Head Cap Screws with Ventilation Hole	Hexagon Head Bolts （with Ventilation Hole）	Hex Socket Set Screws (with Ventilation Hole)	Socket Head Cap Screws with Ventilation Hole - SUS316L	Washer Integrated Hex Socket Head Cap Screws with Ventilation Hole - High Strength Stainless Steel	Hex Socket Head Cap Screw with Special Low Profile （SUS316L,with Ventilation Hole）
Part Number	SVSS	SVHS	SVTS	SVSL	SVSQLG	SVSHL
	Click here for the lineup			Click here for the lineup

 

Material	Inconel equiv.	Pure molybdenum	Hastelloy equiv.		Aluminum	Titanium
Part Name	Hex Socket Head Cap Screws （Inconel equiv.） with Ventilation Hole	Molybdenum Hex Socket Head Cap Screws with Ventilation Hole	Hex Socket Head Cap Screws (Hastelloy C-22 equiv.) with Ventilation Hole	Hex Socket Head Cap Screws (Hastelloy C-276 equiv.) with Ventilation Hole	Aluminum Hex Socket Head Cap Screws with Ventilation Hole	Hex Socket Head Cap Screws with Ventilation Hole - Titanium
Part Number	SVSI	SVSM	SVSH-C22	SVSH-C276	SVSA	SVST
	Click here for the lineup	Click here for the lineup	Click here for the lineup		Click here for the lineup	Click here for the lineup

・Various shapes
A wide lineup of shapes is available, such as low profile cap screws, washer-integrated products, and clamping screws.

Shape example	Screws with Low Profile	Screws with Special Low Profile	Hexagon posts	Clamping Set Screws	With Washer	Washers
Part Name	Socket Head Cap Screws with Ventilation Hole with Low Profile	Socket Head Cap Screws with Ventilation Hole with Special Low Profile	Hex Posts with Ventilation Hole	Clamping Set Screws with Ventilation Hole	Washer Integrated Hex Socket Head Cap Screws with Ventilation Hole - High Strength Stainless Steel	Washers with Ventilation Grooves
Part Number	SVLS	SVSHS	SHVAS	SCSS-VR	SVSQLG	SWAS-VF
	Click here for the lineup	Click here for the lineup	Click here for the lineup	Click here for the lineup	Click here for the lineup	Click here for the lineup

・Seizing prevention
Our products are ideal for preventing seizing.

Material	SUS316L	SUSXM7(Equivalent to SUS304)	SUSXM7(Equivalent to SUS304)
Part Name	Socket Head Cap Screws with Ventilation Hole （ with Ventilation Hole / Surface Hardening Treatment）	Socket Head Cap Screws with Ventilation Hole - MoS2 Shot	Socket Head Cap Screw with Ventilation Hole / Silver Plating
Part Number	SVSL-PN	SVSS-MOS	SVSS-AG
	Click here for the lineup

Click here to read more about seizing

Click here for our full lineup of screws for vacuum equipment

Low outgas products

In addition to screws for vacuum equipment, we also have a range of low outgas screws and couplings.
・Screws

Part Number	SPD-C	SPDC-H	SPE-C
Material	VESPEL® SP-1	VESPEL® SCP-5000	PEEK
	Click here for the lineup

 

・Coupling

Couplings that can be used in special environments such as clean room, vacuum, high temperature (80 ° C or higher) are available.

Type	Slit Coupling			Oldham Coupling		Disk Coupling
Shape
Part Number	XSTS	XWSS	MSXP	MOHS	MOP	XBWS＊	XBSS＊
Material	SUS316L	SUS316L	PEEK	SUS303 Vespel＊＊ SUSXM7	A2017 PEEK SUSXM7	SUS303 SUSXM7	SUS303 SUSXM7
Cleaning method	Ultrasonic cleaning	Ultrasonic cleaning	Ultrasonic cleaning	Ultrasonic cleaning	Ultrasonic cleaning	Ultrasonic cleaning＊	Ultrasonic cleaning＊
Low particle	◎	◎	◎	△	△	○	○
Vacuum-supported	○	○	○	◎	◎	○	○
Less outgas	○	○	○	○	○	○	○
Heat resistant	○	○	○	◎	◎	○	○
Chemical resistant	◎	◎	◎	○	○	○	○
Zero Backlash	◎	◎	◎			◎	◎
High torque	○	○				○	○
High torsional rigidity						◎	◎
Allowable Misalignment	○		○	◎	◎	○	○

◎:Excellent　○:Very good　△:Abrasion powder may be produced
＊XBWS XBSS are uncleaned products. Clean washing and clean packaging are available upon request.
＊＊VESPEL is a registered trademark of U.S. company DuPont.

Click here for details

Cleanroom "Cleanroom Wash / Cleanroom Packing Service"

Cleanroom washing and cleanroom packing can be performed so that items can be used directly in a vacuum chamber or a cleanroom.

Problem Solution Examples by Semiconductor Manufacturing Process

Problem solution examples are introduced by semiconductor manufacturing process.
Pre-process here
Post-processhere

"The Semiconductor Industry and NBK" back numbers

List here