Date Published:Jun. 15. 2022

No. 2: Vacuum environments

Vacuum technology is often used in semiconductor manufacturing equipment.
A vacuum is not required for all equipment. A vacuum would mainly be required for equipment that uses plasma or an electron beam.
A vacuum chamber is a box or room that has been converted into a vacuum environment using a vacuum pump.

Here, we introduce examples in which screws for vacuum equipment (special products) are used in a vacuum environment

Why is a vacuum required for semiconductor manufacturing equipment?

・To reduce impurities and improve response quality
Performing processes such as film formation and etching in a vacuum with few impurities allows for higher quality treatment.

・To lower the boiling point
Lowering the boiling point allows for wafers to be treated at a low temperature.
Wafers are less apt to deform when temperature changes are controlled.
Finally, there is no need for manufacturing equipment to be built or designed to resist high temperatures.

・To generate plasma
A lower pressure also means that applied electricity can be lower.
A vacuum also allows plasma to be generated in a wide variety of gases.

Types of vacuums

There are actually several types of vacuums.
・Low vacuum: 100 kPa to 100 Pa
・Medium vacuum: 100 Pa to 0.1 Pa
・High vacuum: 0.1 Pa to 10-⁵ Pa
・Ultra-high vacuum: 10-⁵Pa or less

NBK has a range of products ideal for use in vacuum environments


Vacuum Application Screws

Screws and washers that support the evacuation of gas trapped in the bottom of screw holes or drilled holes are available.

The ventilation holes on NBK screws for vacuum equipment are made using a method that has little effect on metal structure.
They can suppress brittle fractures during use and the generation of outgas in vacuum environments.

<Extensive lineup>    Click here for our full lineup of screws for vacuum equipment
Low Outgas
Special chemical polishing is used to improve surface roughness. Outgas quantity is extremely low.
 
Material SUSXM7
(SUS304相当)
Titanium
Part Name Socket Head Cap Screws with Ventilation Hole Hex Socket Head Cap Screws with Ventilation Hole - Titanium Hex Socket Head Cap Screw with Special Low Profile
(Titanium, with Ventilation Hole)
Phillips Cross Recessed Flat Head Titanium Machine Screws
(with Ventilation Hole)
Phillips Cross Recessed Pan Head Titanium Machine Screws
(with Ventilation Hole)
Part Number SVSS-PC SVST SVSHT SVFT SVPT
  Click here for the lineup

Various materials
A wide lineup of materials is available, including highly corrosion resistant Inconel (equivalent) and Hastelloy (equivalent), and non-magnetic titanium.

 
Materials SUS304・SUSXM7
(Equivalent to SUS304)
SUS316L
Part Name Socket Head Cap Screws with Ventilation Hole Hexagon Head Bolts
(with Ventilation Hole)
Hex Socket Set Screws
(with Ventilation Hole)
Socket Head Cap Screws with Ventilation Hole - SUS316L Washer Integrated Hex Socket Head Cap Screws with
Ventilation Hole - High Strength Stainless Steel
Hex Socket Head Cap Screw with Special Low Profile
(SUS316L,with Ventilation Hole)
Part Number SVSS SVHS SVTS SVSL SVSQLG SVSHL

Click here for the lineup Click here for the lineup

 

 
Material Inconel equiv. Pure molybdenum Hastelloy equiv. Aluminum Titanium
Part Name Hex Socket Head Cap Screws (Inconel equiv.) with Ventilation Hole Molybdenum Hex Socket Head Cap Screws with Ventilation Hole Hex Socket Head Cap Screws (Hastelloy C-276 equiv.) with Ventilation Hole Hex Socket Head Cap Screws (Hastelloy C-22 equiv.) with Ventilation Hole Aluminum Hex Socket Head Cap Screws with Ventilation Hole Hex Socket Head Cap Screws with Ventilation Hole - Titanium
Part Number SVSI SVSM SVSH-C22 SVSH-C276 SVSA SVST
  Click here for the lineup
Click here for the lineup
Click here for the lineup
Click here for the lineup
Click here for the lineup

Various shapes
A wide lineup of shapes is available, such as low profile cap screws, washer-integrated products, and clamping screws.
   
Shape example Screws with Low Profile Screws with Special Low Profile Hexagon posts Clamping Set Screws With Washer Washers
Part Name Socket Head Cap Screws with Ventilation Hole with Low Profile Socket Head Cap Screws with Ventilation Hole with Special Low Profile Hex Posts with Ventilation Hole Clamping Set Screws with Ventilation Hole Washer Integrated Hex Socket Head Cap Screws with Ventilation Hole - High Strength Stainless Steel Washers with Ventilation Grooves
代表品 SVLS
SVSHS SHVAS SCSS-VR SVSQLG SWAS-VF
  Click here for the lineup Click here for the lineup
Click here for the lineup
Click here for the lineup
Click here for the lineup
Click here for the lineup

Seizing prevention
Our products are ideal for preventing seizing.

 
材質 SUS316L SUSXM7(Equivalent to SUS304)
SUSXM7(Equivalent to SUS304)
Part Name Socket Head Cap Screws with Ventilation Hole
with Ventilation Hole / Surface Hardening Treatment)
Socket Head Cap Screws with Ventilation Hole - MoS2 Shot Socket Head Cap Screw with Ventilation Hole / Silver Plating
Part Number SVSL-PN SVSS-MOS SVSS-AG

Click here for the lineup
Click here to read more about seizing

Click here for our full lineup of screws for vacuum equipment

Click here for special product problem solution examples using screws for vacuum equipment

Low outgas products

In addition to screws for vacuum equipment, we also have a range of low outgas screws and couplings.
Screws
 
材質 SPD-C SPDC-H SPE-C
代表品名 VESPEL® SP-1 VESPEL® SCP-5000 PEEK
  Click here for the lineup

 

Coupling

Couplings that can be used in special environments such as clean room, vacuum, high temperature (80 ° C or higher) are available.

Type Slit Coupling Oldham Coupling Disk Coupling
Shape クリーン・真空・耐熱対応カップリング - スリットタイプ(SUS316L) - クランピングタイプ クリーン・真空・耐熱対応カップリング - スリットタイプ(SUS316L) - クランピングタイプ クリーン・真空・耐熱対応カップリング - スリットタイプ(PEEK) - クランピングタイプ クリーン・真空・耐熱対応カップリング - オルダムタイプ(ベスペル) - クランピングタイプ クリーン・真空・耐熱対応カップリング- オルダムタイプ(PEEK) - クランピングタイプ フレキシブルカップリング-ディスクタイプ-クランピングタイプ フレキシブルカップリング-シングルディスクタイプ-クランピングタイプ
Part Number XSTS XWSS MSXP MOHS MOP XBWS XBSS
Material SUS316L SUS316L PEEK SUS303
Vespel**
SUSXM7
A2017
PEEK
SUSXM7
SUS303
SUSXM7
SUS303
SUSXM7
Cleaning method Ultrasonic cleaning Ultrasonic cleaning Ultrasonic cleaning Ultrasonic cleaning Ultrasonic cleaning Ultrasonic cleaning Ultrasonic cleaning
Low particle
Vacuum-supported
Less outgas
Heat resistant
Chemical resistant
Zero Backlash    
High torque      
High torsional rigidity          
Allowable Misalignment  

:Excellent ○:Very good △:Abrasion powder may be produced
XBWS XBSS are uncleaned products. Clean washing and clean packaging are available upon request.
**VESPEL is a registered trademark of U.S. company DuPont.

Click here for details

Cleanroom "Cleanroom Wash / Cleanroom Packing Service"

Cleanroom washing and cleanroom packing can be performed so that items can be used directly in a vacuum chamber or a cleanroom.

Problem Solution Examples by Semiconductor Manufacturing Process

Problem solution examples are introduced by semiconductor manufacturing process.
Pre-process here
Post-processhere

"The Semiconductor Industry and NBK" back numbers

List here

Product Introduction Improved productivity/workability Safety measures/precautionary measures Machine Tools Semiconductor Manufacturing Equipment Food Machinery Automotive Manufacturing Process Medical equipment FA Devices The Semiconductor Industry and NBK Special Screws Machine Elements