Date Published:Jul. 06. 2022 Date Updated:Nov. 18. 2024
No. 4: Electron beam and ion
Equipment using electron beams and ions
Typical equipment examples include
・Electron beam lithography equipment
・Electron beam exposure equipment
・Scanning electron microscopes
・Ion implantation equipment
These equipment types use large quantities of low-magnetism parts in order to avoid affecting the electron beams or ions.
As well, because electron beams are used in vacuum environments in order not to collide with airborne molecules, many types of equipment include vacuum chambers.
For vacuum environments, see here
・Electron beam lithography equipment
・Electron beam exposure equipment
・Scanning electron microscopes
・Ion implantation equipment
These equipment types use large quantities of low-magnetism parts in order to avoid affecting the electron beams or ions.
As well, because electron beams are used in vacuum environments in order not to collide with airborne molecules, many types of equipment include vacuum chambers.
For vacuum environments, see here
NBK offers non-magnetic products
Click here for our full lineup
Tools for locations where magnetization is to be avoided are also available.
 |
 |
 |
 |
 |
 |
|
| Material | Tantalum | C5191（Phosphor Bronze） | Grade 5 Titanium | Grade 2 Titanium | β Titanium | SUS316L |
| Part Name | Hex Socket Head Cap Screws （Tantalum） |
Hex Socket Head Cap Screws - Phosphor Bronze | Hex Socket Head Cap Screws - High Intensity Titanium Alloy | Hex Socket Head Cap Screws - Titanium | Cross Recessed Flat Head Machine Screws - High Intensity Titanium Alloy | Socket Head Cap Screw with Special Low Profile - Stainless Steel |
| Part Number | SNSTA | SNSP | SNSTG | SNST | SNFTG | SSHL |
| Click here for the lineup | Click here for the lineup | Click here for the lineup |
Click here for the lineup |
|||
Tools for locations where magnetization is to be avoided are also available.
 |
 |
|
| Material | 64 Titanium | CFRTP（Carbon Fiber Reinforced Thermoplastics resin） |
| Part Name | Titanium Hexagon Key | CFRTP Adjustable Wrench |
| Part Number | SKHTG | SKMWCP-200 |
| Click here for the lineup | ||
Problem Solution Examples by Semiconductor Manufacturing Process
Problem solution examples are introduced by semiconductor manufacturing process.Pre-process here
Post-process here
"The Semiconductor Industry and NBK" back numbers
List here
Product Introduction
Cleanroom/vacuum/non-magnetic
Semiconductor Manufacturing Equipment
The Semiconductor Industry and NBK
Special Screws
